1

Deep Silicon Etching in Inductively Coupled Plasma Reactor for MEMS

Année:
1999
Langue:
english
Fichier:
PDF, 564 KB
english, 1999
2

Measurement of Oxide Etch Rate of SOI Structure using near IR Microscopy

Année:
2002
Langue:
english
Fichier:
PDF, 107 KB
english, 2002